FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO2 Surfaces
نویسندگان
چکیده
منابع مشابه
FTIR-ATR evaluation of organic contaminant cleaning methods for SiO2 surfaces.
The effectiveness of cleaning organic contaminants from silicon dioxide (SiO2) surfaces was studied by conducting highly sensitive measurements using Fourier Transform Infrared Attenuated Total reflectance (FTIR-ATR) with a Si prism as the waveguide. To serve as an example, the surface of the prism was oxidized to an order of a few nanometers. The oxidized Si surface film was allowed to stand i...
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ژورنال
عنوان ژورنال: Analytical Sciences
سال: 2003
ISSN: 0910-6340,1348-2246
DOI: 10.2116/analsci.19.1557